METHOD FOR REPAIRING TEMPLATE, METHOD FOR FORMING PATTERN AND APPARATUS FOR REPAIRING TEMPLATE CAPABLE OF DEVIDING THE PATTERN OF THE IMPRINT MATERIAL HARDENING BY IMPROVING THE RELEASABILITY

摘要

PURPOSE: A method for repairing template, method for forming pattern and apparatus for repairing template is provided that the surface of the uneven pattern of template is dipped in an etching solution and the base metal is etched. The foreign material put between in the defective portion is removed.;CONSTITUTION: A method for repairing template comprises the following steps. A template(1) has a base metal(2) and the first release layer(4). The first release layer is formed in the pattern surface of the base metal. The material is provided to the pattern surface, and has affinity about the base metal. The non-affinity with is had about the release layer.;COPYRIGHT KIPO 2012