STATIC PRESSURE SLIDER, AND CONVEYING APPARATUS AND PROCESSING APPARATUS HAVING THE SAME

摘要

The present invention is a fixture (2) and the fixture (2) is interposed between the static pressure fluid layer is in a state of high static pressure slider having a relative movably the movable element 3 with respect to the fixture (2) . Positive pressure slider is the first conductor layer 25 (26 to 28) and , at least with respect to the fixed body part (2 ), the first conductor layer 25 (26 to 28) the first conductor layer by an electrostatic force acting between the 25, the distance to the ( 26-28 ) further comprises a second conductor layer (31A) (32A ~ 34A) that allows the change . Furthermore, the invention relates to conveying apparatus and processing apparatus having the static pressure slider .