Silicon strip photo-sensor and 2D-position and energy measurements of the radiation detector using the same

摘要

PURPOSE: A strip optical sensor, and a detector for detecting the two-dimensional position and energy of the radiation using the same are provided to detect the energy and position information of light with low cost by forming a light-receiving layer on the whole surface with a PIN diode structure. CONSTITUTION: A strip optical sensor(100) comprises a semiconductor substrate(110), an impurity layer(120), a detection layer(130), an anti-reflective layer(140), and an electrode(132). The semiconductor substrate is composed of base materials. The impurity layer is formed on the upper surface of the semiconductor substrate. The detection layer is formed on the lower surface of the semiconductor substrate by strip. The anti-reflective layer is laminated on the upper surface of the impurity layer.