Mask for forming a thermal sprayed protrusion, method for forming a thermal sprayed protrusion using the mask and method for manufacturing a substrate supporting apparatus using the mask

摘要

A mask for forming a thermal sprayed protrusion, method for forming a thermal sprayed protrusion is provided to prevent vortex and allow fused dielectric material flowed into the penetration holes by using diameter difference of the penetration hole. A mask(100) for forming a thermal sprayed protrusion includes a first plate(110) and a second plate(120). The first plate and the second plate are included. The first plate a plurality of first penetration holes(112) is included as the flat board form. A first plate is plate type and includes a plurality of first penetration holes. A first side(110a) of the first plate and the second side(110b) opposite to the first side are penetrated by the first penetration holes. The first part(112a) and the second part(112b) are included in first penetration holes. The first part having a certain diameter is extended to the inside from the first side, and the second part has an incline side.