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Atmospheric pressure plasma generating device and atmospheric pressure plasma device for treating the surface having the same
Atmospheric pressure plasma generating device and atmospheric pressure plasma device for treating the surface having the same
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机译:大气压等离子体产生装置和用于处理具有该表面的气压等离子体装置
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摘要
PURPOSE: The atmospheric pressure plasma surface treatment apparatus equipped with atmosphere pressure plasma generating apparatus, and method and the atmosphere pressure plasma generating apparatus for occurring the atmospheric pressure plasma. In the vacuum condition using the Venturi principle, using the reaction initial igniting, the plasma can be occurred under the atmospheric pressure to the power consumption lowing without the separate ignition means from the reaction gas. CONSTITUTION: The reaction space(110) forms the opened gas emit hole squirting the plasma gas which becomes. It leaves the reaction space in interval and the power electrode(120) and ground electrode(130) are separated. The gas feed port(140) forms the flow path for the reaction gas introduction into the reaction space. The fire drift space(160) instantaneously keeps the vacuum condition through the gas feed port with the flow flow of the reaction gas introduced to the reaction space.
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