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Atmospheric pressure plasma generating device and atmospheric pressure plasma device for treating the surface having the same
Atmospheric pressure plasma generating device and atmospheric pressure plasma device for treating the surface having the same
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机译:大气压等离子体产生装置和用于处理具有该表面的气压等离子体装置
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摘要
PURPOSE: An atmospheric pressure plasma generating apparatus and an atmospheric pressure plasma surface treatment apparatus comprising the same are provided to perform stable and uniform plasma surface treatment, by injecting a plasma gas between a first injection hole and a second injection hole through a number of injection through-holes. CONSTITUTION: A power source electrode(110) has a bottom of flat semicircular shape or elliptic profile shape. A first ground electrode(120) generates plasma in a space separated from the power source electrode by reacting to the power supply electrode. A second ground electrode(130) generates plasma in a space separated from the power source electrode by reacting to the power source electrode. A gas feed port(140) supplies a reaction gas to a space separated between the power source electrode and the second ground electrode. A first injection hole(151) is located in one end of the power source electrode. A second injection hole(152) is located in the other end of the power source electrode.
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