Manufacturing method of silica powder using ultrasonic spray pyrolysis method

摘要

PURPOSE: A producing method of silica powder using an ultrasonic spray pyrolysis method is provided to prevent the generation of harmful gas, and to mass produce the silica powder. CONSTITUTION: A producing method of silica powder using an ultrasonic spray pyrolysis method comprises the following steps: adding a silicon complex compound and alkaline salt to a solvent, and supplying the mixed initial solution to a sample chamber; activating the initial solution into droplets with ultrasonic waves; supplying transport gas to the sample chamber, and spraying the droplets to a reaction chamber; thermally decomposing the droplets and oxidizing; and collecting the silica powder form the reaction chamber.