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Stimulation sensitive composition, the compound and the pattern forming method using the stimulus-sensitive composition
Stimulation sensitive composition, the compound and the pattern forming method using the stimulus-sensitive composition
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机译：刺激敏感组合物，化合物以及使用该刺激敏感组合物的图案形成方法
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摘要
Stimulation sensitive composition has a specific structure, and comprises a compound (A) that generates one of the acid and a radical by external stimulation.
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