DIGITAL LITHOGRAPHIC PATTERN DATA CREATION METHOD WHICH IS ARRANGED TO A DELTA FORM AND A DIGITAL LITHOGRAPHY APPARATUS USING THE SAME

摘要

PURPOSE: A digital lithographic pattern data creation method and a digital lithography apparatus using the same are provided to precisely pattern using the image address structure which is arranged to a delta form and to perform data operation in order to obtain pattern data.;CONSTITUTION: A vector graphics image is tilted image as the alignment angle of an image address structure which is arranged to a delta form. The vector graphics image is changed into a raster graphics image(240). An imaginary projecting structure(250) coping with a plurality of digital micro-mirror devices is tilted as the alignment angle. The raster graphics image and projecting structure are matched. On and off operation of a plurality of digital micro-mirror devices is determined.;COPYRIGHT KIPO 2012