Mold, microlens, and method of fabrication of the silicon mold and microlens array with aspheric surface shape

摘要

The present specification provides an aspheric silicon mold, a micro lens array, and a method of manufacturing the silicon mold and the micro lens array. According to an embodiment of the present disclosure, a method of manufacturing an aspherical silicon mold may include depositing an oxide film on one surface of a substrate, applying a photoresist to the deposited oxide film, and having a predetermined interval on the applied photoresist. Forming a photoresist mask to form a photoresist mask, etching the patterned photoresist mask with a predetermined electrolyte solution, and removing the oxide film of the substrate on which the etching is completed. It is characterized in that the DMSO is included.