The development equipment of auto trimmibg defect machine vision and using methods of semiconductor IC

摘要

As information and communication develops, communication systems must develop accordingly, and the trend toward miniaturization and lightening of the system is increasing. The present invention is an equipment that checks and classifies defects by automatically inspecting the surface and trimming state of semiconductors and automatically detecting the defects in Machine Vision. The inspection items of Trimming are Lead Pitch, Mold Burr, Lead Damage, Gate Burr, Dambar Broken, Dambar Broken, Dambar Uncut;Dambar Burr, Nick, Mold Burr, Lead Damage, Gate Burr, etc. The semiconductor surface and the Trimming inspection result window were invented to display the number of errors for the Trimming inspection item, and to display the total number of good and defective items, the total number of inspections, and the number of quality satisfaction. The object of the present invention is to automatically inspect the trimming state of semiconductors and to inspect the quality in real time in the manufacturing line, thereby contributing to the identification of the cause of the defect rate and improving the quality and improving the productivity. And an inspection algorithm and a system for classifying defects. This system consists of one line scan CCD camera for inspection of trimming state of semiconductor, frame grabber, computer and lighting equipment for image processing, one area scan CCD camera for frame inspection, frame grabber, It consists of hardware and software such as computer and lighting equipment for image processing. Firstly, it is a device that captures the image of the object, and the image data is transferred to the computer's memory through the image frame grabber. CCD camera consists of camera body, signal cable and lens. It is a device that receives the image data stored in the CCD camera, and is in charge of driving and interface of the CCD camera. The frame grabber used in this system consists of three parts: camera interface, image memory and PCI bus interface. The instrument part consists of a transport mechanism to smooth the part and transport it onto the correct inspection system, an optical mechanism for the optimal inspection environment, and a housing for light control. And an optical filter. The control panel is a PLC and other electrical and electronic systems that provide outputs to the motion controller, proximity sensor, lighting controller, host computer and peripheral equipment for driving inspection programs, and reports on defective parts. The inspection software runs on Windows XP's O / S on the main computer, which controls peripherals, performs inspections, sets inspection items and parameters, as well as stores images of the IC's trimming status. Play a role.; Trimming Inspection System of Semiconductor IC, Semiconductor Component Inspection Equipment, LCD Component Inspection Equipment, Electrical Component Inspection Equipment, Electronic Component Inspection Equipment, Mechanical Component Inspection Equipment.