Composite micromechanical piece e.g. escape wheel, fabrication method for timepiece, involves realizing electroplating process by connecting electrode to lower layer to form metallic parts of micromechanical piece released from substrate

摘要

The method involves covering an upper part of a substrate of an electrically insulating coating deposit. The deposit and an intermediate layer (22) are engraved in a directional manner to limit presence of the deposit and the intermediate layer at a level of vertical walls (52) formed in an upper layer (21). An electroplating process is realized by connecting an electrode to a lower layer to form metallic parts (43) of a micromechanical piece (41). The piece is released from the substrate. The upper and lower layers are made of silicon and the intermediate layer is made of silicon dioxide.