Apparatus for determining a target position of a charged particle beam, a process for the use of the device and in front of the direction of treating the apparatus for determining a target position is used

摘要

Apparatus for determining a target position of a charged particle beam, comprising:a setting unit (14), one of the irradiation position of a charged particle beam irradiation position be determined from a source (11) of the charged particle beam is radiated, in a depth direction of an object is established,a reflection means (18), the the the charged particle beam is transmitted, or it can pass through, and a first light emitted from a region of the object, the with the the charged particle beam is irradiated, is emitted, and a second emitted light, which, due to an irradiation with an excitation light from a region, including the region of the object, the with the the charged particle beam is irradiated, which is emitted from the axis of the charged particle beam path reflected, andan imaging unit (24) at a position where the first emitted light and the second emitted light, which are reflected from the reflection means, is arranged and the region, including the region of the object, the with the..