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Application of broadband scanning for arc detection with a probabilistic model for the quantitative measurement of arcing events
Application of broadband scanning for arc detection with a probabilistic model for the quantitative measurement of arcing events
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机译:宽带扫描在电弧检测中的概率模型在电弧事件定量测量中的应用
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摘要
An arc detection system for a plasma generation system includes a radio frequency (RF) sensor that generates first and second signals based on a respective electrical properties of (RF) power that is in communication with a plasma chamber. A correlation module generates an arc detect signal based on the first and second signals. The arc detect signal indicates whether an arc is occurring in the plasma chamber and is employed to vary an aspect of the RF power to extinguish the arc.
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