Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc events

摘要

An arc detection system for a plasma generation system includes a radio frequency (RF) sensor (16) that generates first and second signals based on a respective electrical properties of (RF) power that is in communication with a plasma chamber (18). A correlation module (34) generates an arc detect signal based on the first and second signals. The arc detect signal indicates whether an arc is occurring in the plasma chamber (18) and is employed to vary an aspect of the RF power to extinguish the arc.