Method for manufacturing micromechanical structure, involves forming substrate with main extension level and manufacturing two caverns within substrate

摘要

The method involves forming a substrate (2) with a main extension level (100), manufacturing two caverns (3,4) within the substrate and locking the former cavern with a diaphragm range (5) and the latter cavern with another diaphragm range (6). The former diaphragm range is formed perpendicularly to the main extension level with a certain thickness (7), which is different from thickness (8) of the latter diaphragm range.