Method for manufacturing collimator that is utilized as analysis grid at x-ray detector for reducing e.g. scattered beam in computer tomography scanner for examining patient, involves filling intermediate spaces with gold or tungsten

摘要

The method involves producing a grid structure made of silicon bars (5) in a n-doped silicon substrate (1) in a periodic arrangement under application of technology for manufacturing porous silicon, where intermediate spaces (3) lie between the silicon bars. The intermediate spaces are partially filled with gold or gold alloy or with a tungsten or a tungsten alloy to form the bars that absorb x-rays. Middle distance of bars is adjusted to a value that lies between one and five micrometer, where the bars exhibit aspect ratio that lies between 1:50 and 1:250. An independent claim is also included for a computer tomography scanner that comprises an x-ray detector.