Optical module for guiding extreme UV radiation beam in lighting system of microlithographic projection-illumination system, has central control unit in signal connection to integrated electronic displacement circuit

摘要

The module has a mirror with individual mirrors (27) whose reflective surfaces (34) complement each other to form an overall mirror reflective surface. A supporting structure (36) is mechanically connected to a mirror body (35) of the respective individual mirror via a thermally conductive section (37). The body has an actuator (50) e.g. Lorentz actuator, to displace the body relative to the structure in a degree of freedom. An integrated electronic displacement circuit is assigned to each individual mirror in spatial proximity. A central control unit is in signal connection to the circuit. Independent claims are also included for the following: (1) a method for controlling an optical module (2) a method for manufacturing structured components.