Electrode arrangement for ion getter pump, has cathode plates formed in inner space, where side of electrode arrangement is designed as gas inlet opening side, and field-optimized design is formed over entire height of anode element

摘要

The electrode arrangement has cathode plates (3) formed in an inner space, where a side of the electrode arrangement is designed as a gas inlet opening side (4). An anode element (1) of an anode element stack runs at a distance from one another in the longitudinal direction of an opening side. A field-optimized design (5) is formed over the entire height of the anode element.