Microstructured sensor e.g. infra red thermometer for detection of infra red radiation, has thermopile measuring structure for measuring temperature difference between measuring membrane and reference membrane

摘要

The sensor (1) i.e. infra red (IR) thermometer, has a measuring channel with a measuring membrane (14a) on which a sensitive detector surface (15a) for absorbing IR radiation is formed. A reference channel has a reference membrane on which another sensitive detector surface is formed to absorb another IR radiation. A thermopile measuring structure is formed between the measuring membrane and the reference membrane for measuring a temperature difference between the measuring membrane and the reference membrane.