Micromechanical component e.g. pirani-sensor, for use in Hall-sensor device utilized for measuring e.g. magnetic fields, has semiconductor region connected with semiconductor substrate by holding element that partially overstretches cavern

摘要

The component has a Hall element formed at a semiconductor substrate (14). The hall element has power supply contacts (20a) and voltage contacts (22a) designed such that current flow is fed through a semiconductor region (10) by the power supply contacts and voltage information is tappable with respect to Hall voltage by the voltage contacts. A cavern (12) is formed in the substrate, and the semiconductor region is arranged at/in a peripheral region of the cavern. The semiconductor region is connected with the substrate by a holding element (16) that partially overstretches the cavern. An independent claim is also included for a method for manufacturing a micromechanical component.