Pressure e.g. absolute pressure, measuring device for industrial measurement engineering, has disks covering recess, and semiconductor pressure sensor attached on disks and comprising membrane carrier and measuring membrane

摘要

The device has a socket (3) mounted on a base of a housing (1), and a carrier (5) projecting over the socket. The carrier has a front side that is turned towards the socket and comprises a cup-shaped recess (9). Disks (11, 11') cover the recess and comprise an insulator, and a semiconductor pressure sensor (13) is attached on the disks. The sensor has a membrane carrier (15) and a measuring membrane (17), where the carrier and the sensor comprise same thickness and are made of silicon. The socket is made of metal or ceramic, and the disks are made of glass.