Pressure sensor arrangement for determining e.g. absolute pressure of absolute pressure sensor membrane, has sensor element penetrating enclosure and protruding into sensor chamber in areas, and evaluation circuit arranged outside chamber

摘要

The arrangement (1) has a sensor element (3) and an evaluation circuit (4) i.e. application specific integrated circuit, arranged on a carrier (2). A sensor membrane (15) e.g. absolute pressure sensor membrane, of the sensor element is arranged in a sensor chamber (10), which is designed by an enclosure (11) connected with the carrier. The membrane is subjected with pressurized medium via an opening (14). The sensor element penetrates the enclosure and protrudes into the sensor chamber in areas. The evaluation circuit is arranged outside the sensor chamber.