Multiply utilizing a laser source in a laser processing system, comprises deflecting a laser beam of the laser source using a switchable beam switch or dividing the laser beam of the laser source into partial beams using a beam splitter

摘要

The method for multiply utilizing a laser source (10) in a laser processing system, comprises deflecting a laser beam of the laser source using a switchable beam switch (40) or dividing the laser beam of the laser source into partial beams using a beam splitter (50), feeding the deflected laser beams and/or the partial beams to a first processing optical unit of a first working field (60) and to a second processing optical unit of a second working field (61), and independently modulating the deflected laser beams and/or the partial beams using an electro-optical system. The method for multiply utilizing a laser source (10) in a laser processing system, comprises deflecting a laser beam of the laser source using a switchable beam switch (40) or dividing the laser beam of the laser source into partial beams using a beam splitter (50), feeding the deflected laser beams and/or the partial beams to a first processing optical unit of a first working field (60) and to a second processing optical unit of a second working field (61), and independently modulating the deflected laser beams and/or the partial beams using an electro-optical system. The deflected laser beams and/or the partial beams are switched on or switched off using pocket cells and polarization beam splitter directly or by using driver, and are adjusted in their performance. The beam length of the deflected laser beams and/or partial beams are separately stabilized for each of the processing optical units. The beam length of the laser beam of the laser source is additionally stabilized. The deflected laser beams and/or the partial beams are sequentially fed to a common detector for performance measurement of the deflected laser beams and/or partial beams by using switchable beam switches. The frequency of the deflected laser beams and/or the partial beams is changed using an optical system for frequency multiplication or frequency doubling. An independent claim is included for a device for multiply utilizing a laser source in a laser processing system.