Method for cleaning optical position measuring system used in determining position of glass substrate during coating in physical vapor deposition coating plant, involves performing local heat regulation to control temperature of sensor head

摘要

The method involves receiving and transmitting an optical signal via an exit (3) of a sensor head (2). Local heat regulation is performed for controlling temperature of the sensor head based on heat conductivity of a coating material of the sensor head and secondary heat in a coating plant. The local heat regulation is performed by a heating element (5) whose heating power is controlled by a temperature sensor (4). The sensor controls the temperature of the sensor head to be above condensation temperature of the coating material. An independent claim is also included for an optical position measuring system.