Microradiation source, which is prepared by focussing ion implantation of a radioactive isotope on a semiconductor material using superconducting magnets

摘要

The microradiation source, which is prepared by focussing ion implantation of a radioactive isotope on a semiconductor material using superconducting magnets and having a radius smaller than 20 microns, is claimed. Independent claims are included for: (1) a method for producing a microsystem; (2) a housing for a micro system; and (3) a micro system.