Hybrid actuator element e.g. electrostatic actuator, for actuating high temperature prevail or aggressive fluid in fluid system, has deflection element and housing part that comprise sintering layers, and arms made of ceramic layers

摘要

The actuator element has a piezoelectric element or a heating element formed on four spring arms (3), and bending joists firmly clamped with each other. The bending joists are bent in a direction of deflection movement of a deflection element (1). An electrode (2) of the deflection element is arranged within a housing (8). The deflection element and a part of the housing made of ceramic material comprise sintering layers, and the spring arms are made of sintered ceramic layers. An aperture is formed in the housing, and the deflection element is vertically to a plane of the aperture. An independent claim is also included for a method for manufacturing a hybrid actuator element.