single-stage mikroantrieb multi-dimensional activity

摘要

A single-stage microactuator is provided. The single-stage microactuator includes: a substrate (11); a fixed plate electrode disposed at a central portion of the substrate; a rectangular stage located above the fixed plate electrode, a plurality of actuating frame parts (33,34,36) surrounding the stage (41), a plurality of comb normal directional deformable spring parts (37), each disposed between each side of the stage and the inner part of each actuating frame part, a plurality of fixed frame parts (21,22,24), an actuating comb electrode (35) provided in each actuating frame of the actuating frame part, a fixed comb electrode (23) arranged alternately in parallel to the actuating comb electrode in each fixed frame of the fixed frame part; and a plurality of comb directional deformable spring parts (30) disposed on one side of each actuating frame part opposite the stage and the opposing side thereof for providing an elastic recovery force in a direction perpendicular to one side of the stage. The microactuator is capable of multi-dimensional actuation using a single electrode in an actuating part and of simplifying a fabrication process without an isolation process step. Furthermore, the microactuator has a spring-supported structure such that it is relatively difficult to generate motions other than the X-Y plane of motion even if a stage with a medium larger than a predetermined size is mounted. IMAGE