首页>
外国专利>
baffle with a control of the deposition of the impurities with a kapazitaetsdifferenz - pressure transducers
baffle with a control of the deposition of the impurities with a kapazitaetsdifferenz - pressure transducers
展开▼
机译:挡板,通过kapazitaetsdifferenz控制杂质的沉积-压力传感器
展开▼
页面导航
摘要
著录项
相似文献
摘要
The disclosed transducer includes a housing, a diaphragm, an inner conductor, an outer conductor, and a first baffle. The housing defines an interior volume. The diaphragm is disposed in the housing and divides the interior volume into a first chamber and a second chamber. The diaphragm flexes in response to pressure differentials in the first and second chambers. The inner conductor is disposed in the first chamber. The outer conductor is disposed in the first chamber around the inner conductor. The first baffle is disposed in the second chamber and defines an inner region, a middle region, and an outer region. The inner region underlies the inner conductor. The middle region underlies the outer conductor. The outer region underlies neither the inner conductor nor the outer conductor. The first baffle defines apertures in at least two of the inner, middle, and outer regions.
展开▼