首页> 外国专利> baffle with a control of the deposition of the impurities with a kapazitaetsdifferenz - pressure transducers

baffle with a control of the deposition of the impurities with a kapazitaetsdifferenz - pressure transducers

机译:挡板,通过kapazitaetsdifferenz控制杂质的沉积-压力传感器

摘要

The disclosed transducer includes a housing, a diaphragm, an inner conductor, an outer conductor, and a first baffle. The housing defines an interior volume. The diaphragm is disposed in the housing and divides the interior volume into a first chamber and a second chamber. The diaphragm flexes in response to pressure differentials in the first and second chambers. The inner conductor is disposed in the first chamber. The outer conductor is disposed in the first chamber around the inner conductor. The first baffle is disposed in the second chamber and defines an inner region, a middle region, and an outer region. The inner region underlies the inner conductor. The middle region underlies the outer conductor. The outer region underlies neither the inner conductor nor the outer conductor. The first baffle defines apertures in at least two of the inner, middle, and outer regions.
机译:所公开的换能器包括壳体,膜片,内部导体,外部导体和第一挡板。壳体限定内部空间。隔膜设置在壳体中并且将内部容积分成第一腔室和第二腔室。隔膜响应于第一腔室和第二腔室中的压力差而弯曲。内部导体设置在第一腔室中。外部导体围绕内部导体布置在第一腔室中。第一挡板设置在第二腔室中,并限定内部区域,中间区域和外部区域。内部区域位于内部导体的下面。中间区域位于外部导体的下面。外部区域既不位于内部导体之下,也不位于外部导体之下。第一挡板在内部,中间和外部区域中的至少两个中限定孔。

著录项

  • 公开/公告号DE602004029353D1

    专利类型

  • 公开/公告日2010-11-11

    原文格式PDF

  • 申请/专利权人 MKS INSTRUMENTS INC.;

    申请/专利号DE20046029353T

  • 发明设计人 LISCHER JEFFREY D.;TRAVERSO ROBERT;

    申请日2004-05-10

  • 分类号G01L19/06;C23C16/00;G01L9/00;G01L9/12;H01L21/00;

  • 国家 DE

  • 入库时间 2022-08-21 17:46:40

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