Brief description of embodiments of a floating gate having an alternating sequence of lines in the first and second materials

摘要

A layer of diblock copolymer comprising at least two polymers and having a lamellar structure perpendicular to a substrate (3) is deposited on a first gate insulator (4) formed on the substrate. One of the polymers of the diblock copolymer layer is then removed in order to form grooves which are parallel in the copolymer layer. The grooves are filled by a first material (6) made of metal or semiconductor - conductor and the remainder of the copolymer layer is eliminated. A second dielectric material (7) is deposited to form a second gate insulator. The second gate insulator of the floating gate then comprises an alternation of first and second parallel lines, respectively in the first (6) and second (7) materials, the second material (7) encapsulating the lines in the first material.