Fabrication of microfluidic device, comprises disposing quantity of borosilicate glass melted between elements of mold, pressing quantity of glass between the elements, separating the elements, and collecting the piece from molded glass

摘要

The process comprises disposing a quantity (1) of borosilicate or silico-sodo-calcic glass melted between elements (2, 3) of a mold (4), whose inner face comprises an imprint unit (7), pressing the quantity of glass between the elements, separating the elements, collecting the piece from molded glass, annealing the piece by etching, and applying a glass sheet on sides of the imprint unit of the molded glass. The glass has a softening temperature, which satisfies an equation as given in the specification. The mold elements are made of a material that withstands the glass softening temperature. The process comprises disposing a quantity (1) of borosilicate or silico-sodo-calcic glass melted between elements (2, 3) of a mold (4), whose inner face comprises an imprint unit (7), pressing the quantity of glass between the elements, separating the elements, collecting the piece from molded glass, annealing the piece by etching, and applying a glass sheet on sides of the imprint unit of the molded glass. The glass has a softening temperature, which satisfies an equation as given in the specification. The mold elements are made of a material that withstands the glass softening temperature, where the material is carbon or a superalloy based of nickel and has a thermal expansion coefficient of greater than the glass. The imprint unit has a length of 10 mu m to 10 mm, and a depth or height of 1 mu m to 5 mm. A demolding material or agent is applied on an internal surface (5) of molded elements.