System and method of the evaluation of deformations in the multilayer plates inhomogeneous

摘要

The present invention relates to a process for the evaluation of non-homogeneous deformations in a first plate (110), the first plate is glued by molecular adhesion on a second plate (120). This method of evaluating comprises a step of at least one raised by a plurality of measurement points, the raised corresponding to a surface profile of the first plate in a given direction and in a determined length, a step of calculating a second derivative from the measurement points of the profile of the surface and a step of evaluating a non-homogeneous deformations in the first plate as a function of the second derivative. The present invention also relates to a device (147) making it possible to evaluate such non-homogeneous deformations.