首页> 外国专利> OPTICAL WAVEGUIDE WITH MIRROR AND METHOD FOR MANUFACTURING THE SAME, FLEXIBLE WAVEGUIDE WITH MIRROR AND METHOD FOR MANUFACTURING THE SAME, AND OPTICAL FIBER CONNECTOR WITH MIRROR AND METHOD FOR MANUFACTURING THE SAME

OPTICAL WAVEGUIDE WITH MIRROR AND METHOD FOR MANUFACTURING THE SAME, FLEXIBLE WAVEGUIDE WITH MIRROR AND METHOD FOR MANUFACTURING THE SAME, AND OPTICAL FIBER CONNECTOR WITH MIRROR AND METHOD FOR MANUFACTURING THE SAME

机译:带镜的光学波导及其制造方法,带镜的柔性波导及其制造方法,带镜的光纤连接器及其制造方法

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical waveguide with a mirror in which a thickness may be reduced and a mirror part including a metal layer may be protected.SOLUTION: A method for manufacturing an optical waveguide 9 with a mirror including an optical waveguide 8 consisting of a lower cladding layer 2, a core pattern 3 and an upper cladding layer 4, a notch part 5 provided in the optical waveguide 8 for converting an optical path, and a mirror 6 disposed in the notch part 5 for converting the optical path, comprises: a step Aof forming the notch part 5 in the optical waveguide 8; a step Bof forming the mirror 6 in the notch part 5; a step Cof filling the notch part 5 with a photosensitive resin layer 7; and a step Dof removing at least a part of the photosensitive resin layer 7 disposed outside the notch part 5 by patterning the photosensitive resin layer 7.
机译:解决的问题:提供一种具有镜的光波导的制造方法,其中可以减小厚度,并且可以保护包括金属层的镜部件。解决方案:一种具有镜的光波导的制造方法9由下部包层2,芯图案3和上部包层4组成的光波导8,设置在光波导8中的用于转换光路的切口部分5,以及设置在切口部分5中的用于反射的镜6。转换光路,包括:在光波导8中形成切口部5的步骤A;在凹口部5上形成反射镜6的步骤B;步骤Cof用感光性树脂层7填充切口部5。步骤Dof,通过对感光性树脂层7进行图案形成,去除位于切口部5的外侧的感光性树脂层7的至少一部分。

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