STRAIN-RESISTIVE THIN FILM AND SENSOR USING THE STRAIN-RESISTIVE THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a strain-resistive thin film capable of holding down a TCR value as the whole strain-resistive thin film, of stabilizing an electric characteristic represented by specific resistance ρ, with respect to a temperature cycle and of realizing excellent high-temperature stability and a high gauge factor, and to provide a sensor using the strain-resistive thin film.;SOLUTION: A strain-resistive thin film 10 or 20 is formed with a laminated film. The laminated film includes at least one or more layers of: a first thin film 11 or 21 that is made of a chromium thin film, a chromic oxide thin film or a chromium nitride thin film; and a second thin film 12 or second thin films 22 and 23 that is or are layered at a first surface 111 of both main surfaces of the first thin film 11 or at both a first surface 211 and a second surface 212, and that has or have a TCR value [ppm K^-1] smaller than the first thin film when making film thickness of the thin films identical. Either second thin film 12 or 22 constituting the laminated film is exposed as an exposed surface S of the laminated film.;COPYRIGHT: (C)2013,JPO&INPIT