PIEZOELECTRIC VIBRATION ELEMENT, PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC OSCILLATOR, VIBRATION GYROSCOPE ELEMENT, VIBRATION GYRO SENSOR AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a piezoelectric vibration element, a piezoelectric vibrator, a piezoelectric oscillator and a piezoelectric gyro sensor which each are designed in a compact size and have improved frequency-temperature characteristics, and electronic equipment using these components.;SOLUTION: A piezoelectric substrate 7 of a piezoelectric vibration element 1 comprises a plurality of vibration arms 15a, 15b; a base part 10 connecting between ends on one side of the vibration arms; weight parts 20a, 20b having wide and first grooves 22a-24a formed therein, which respectively are formed at other ends of each of the vibration arms 15a, 15b; and second grooves 17a-18b formed along the vibration center line of each of the vibration arms 15a, 15b. On the surface and reverse side and the side face of each of the vibration arms 15a, 15b respectively are formed excitation electrodes, thereby exciting flexural-torsional combined vibration. The piezoelectric vibration element 1 uses flexural vibration of the excited flexural-torsional combined vibration as its main vibration, and sets the cut angle and the widths and depths of the first and second grooves of the piezoelectric substrate 7 and the thicknesses of the vibration arms to ensure that the frequency-temperature characteristics of the flexural vibration will be tertiary characteristics with respect to temperature.;COPYRIGHT: (C)2012,JPO&INPIT