PIEZOELECTRIC VIBRATION ELEMENT MANUFACTURING METHOD AND PIEZOELECTRIC VIBRATION ELEMENT, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS, AND RADIO CLOCK

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric vibration element which controls a variation in external accuracy and can obtain a stable vibration characteristic, and the piezoelectric vibration element, a piezoelectric vibrator, an oscillator, an electronic apparatus, and a radio clock.;SOLUTION: In a groove pattern forming process, a photoresist film 42 is formed so as to have an opening 42a in a groove forming area on a wafer mask 40 and to be larger than an external shape of the piezoelectric vibration element (mask 40 for wafer).;COPYRIGHT: (C)2010,JPO&INPIT