METHOD OF MANUFACTURING DIELECTRIC FILM, METHOD OF MANUFACTURING DECOUPLING CAPACITOR, AND DECOUPLING CAPACITOR

摘要

PROBLEM TO BE SOLVED: To obtain a dielectric film having film strength for allowing increase of capacitance by making the pitch of an internal terminal larger than the pitch of an external terminal, and a high particle filling degree, as for a method of manufacturing the dielectric film, a method of manufacturing a decoupling capacitor, and the decoupling capacitor.;SOLUTION: A first mother particle group having an average particle diameter classified in 600-800 nm, a second mother particle group having the same composition as that of the first mother particle group and an average particle diameter classified in 150-200 nm, and a third mother particle group having the same composition as that of the first mother particle group and an average particle diameter classified in 50 nm or less are floated in the air, the floated first to third mother particle groups are sprayed from a nozzle to deposit the dielectric film on a deposition substrate.;COPYRIGHT: (C)2013,JPO&INPIT