LIQUID DROPLET EJECTION APPARATUS, INKJET RECORDING APPARATUS INCLUDING LIQUID DROPLET EJECTION APPARATUS, AND METHOD FOR MANUFACTURING LIQUID DROPLET EJECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a high image quality by optimizing a configuration of a liquid droplet ejection apparatus to suppress variation of discharge performance.;SOLUTION: The liquid droplet ejection apparatus includes: a nozzle substrate 2 having a nozzle hole 20 for ejecting a liquid droplet; a liquid chamber substrate 1 partitioned by a plurality of channel partitions 4 and having a pressurized liquid chamber 14 communicating with the nozzle hole 20; diaphragms (5 to 7) constituting one wall of the pressurized liquid chambers 14; and a lower electrode 8, a piezoelectric material layer 9, and an upper electrode 10 which are disposed on the diaphragms and are laminated one another. A reinforcing layer 12 is disposed at a position corresponding to the pressurized liquid chambers 14 on the diaphragms (5 to 7), and the width of a lower surface on the diaphragm side of the reinforcing layer 12 is formed wider than that of an upper part of the reinforcing layer.;COPYRIGHT: (C)2012,JPO&INPIT