METHOD AND DEVICE FOR MEASURING DISTRIBUTION OF SPECULAR REFLECTION LIGHT

摘要

PROBLEM TO BE SOLVED: To provide a method and device for measuring the distribution of specular reflection light, capable of measuring the distribution and evaluating unevenness in brightness on a sample surface.;SOLUTION: A method for measuring the distribution of specular reflection light includes the steps of allowing illumination light to enter a sample, and measuring the sample surface through a tilted optical system. The angle of the optical axis of the incident illumination light on the sample and the angle of the optical axis for measuring the sample surface have a mirror reflection relation relative to the normal of the sample.;COPYRIGHT: (C)2012,JPO&INPIT