首页> 外国专利> SURFACE EMITTING LASER ELEMENT, SURFACE EMITTING LASER ARRAY, OPTICAL SCANNER, IMAGE FORMING APPARATUS, AND MANUFACTURING METHOD OF SURFACE EMITTING LASER ELEMENT

SURFACE EMITTING LASER ELEMENT, SURFACE EMITTING LASER ARRAY, OPTICAL SCANNER, IMAGE FORMING APPARATUS, AND MANUFACTURING METHOD OF SURFACE EMITTING LASER ELEMENT

机译:面发射激光元件,面发射激光阵列,光学扫描仪,图像形成装置以及面发射激光元件的制造方法

摘要

PROBLEM TO BE SOLVED: To provide a surface emitting laser element capable of suppressing oscillation in a higher order lateral mode without deterioration of light output in a basic lateral mode.SOLUTION: A surface emitting laser element includes a transparent dielectric layer which is provided within an emission area, and in which reflectivity in a peripheral portion and reflectivity in a central portion in the emission area are different from each other. Thicknesses of a contact layer 109 are different from each other in a region with the relatively high reflectivity and in a region with the relatively low reflectivity within the emission area. A contact layer is provided on an outermost surface high refractive index layer of an upper semiconductor DBR. In the region with the relatively low reflectivity, an optical thickness of a combination of the outermost surface high refractive index layer and the contact layer 109 shifts from odd number times of a quarter an oscillation wavelength.
机译:解决的问题:提供一种表面发射激光器元件,该表面发射激光器元件能够抑制高阶横向模式下的振荡,而不会降低基本横向模式下的光输出。发射区域,并且其中发射区域的外围部分的反射率和中心部分的反射率彼此不同。接触层109的厚度在发射区域内在具有相对高的反射率的区域和在具有相对低的反射率的区域彼此不同。在上部半导体DBR的最外表面高折射率层上设置有接触层。在反射率相对较低的区域中,最外表面高折射率层和接触层109的组合的光学厚度偏离四分之一振荡波长的奇数倍。

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