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SURFACE EMITTING LASER ELEMENT, SURFACE EMITTING LASER ARRAY, OPTICAL SCANNER, IMAGE FORMING APPARATUS, AND MANUFACTURING METHOD OF SURFACE EMITTING LASER ELEMENT
SURFACE EMITTING LASER ELEMENT, SURFACE EMITTING LASER ARRAY, OPTICAL SCANNER, IMAGE FORMING APPARATUS, AND MANUFACTURING METHOD OF SURFACE EMITTING LASER ELEMENT
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机译:面发射激光元件,面发射激光阵列,光学扫描仪,图像形成装置以及面发射激光元件的制造方法
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摘要
PROBLEM TO BE SOLVED: To provide a surface emitting laser element capable of suppressing oscillation in a higher order lateral mode without deterioration of light output in a basic lateral mode.SOLUTION: A surface emitting laser element includes a transparent dielectric layer which is provided within an emission area, and in which reflectivity in a peripheral portion and reflectivity in a central portion in the emission area are different from each other. Thicknesses of a contact layer 109 are different from each other in a region with the relatively high reflectivity and in a region with the relatively low reflectivity within the emission area. A contact layer is provided on an outermost surface high refractive index layer of an upper semiconductor DBR. In the region with the relatively low reflectivity, an optical thickness of a combination of the outermost surface high refractive index layer and the contact layer 109 shifts from odd number times of a quarter an oscillation wavelength.
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