NEAR INFRARED LIGHT-ABSORBING DYE COMPOUND, NEAR INFRARED LIGHT-ABSORBING FILM-FORMING MATERIAL, AND NEAR INFRARED LIGHT-ABSORBING FILM FORMED USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a near infrared light-absorbing dye compound having a high solvent solubility and excellent in coating properties, and to provide a material for forming near infrared light-absorbing film as well as a near infrared light-absorbing film formed using the material.;SOLUTION: The near infrared light-absorbing dye compound includes an anion represented by general formula (1), wherein A¹ represents a hydrogen atom or trifluoromethyl group, R⁰ represents a hydroxyl group or -OC(=O)-R', and R' is a 1C-50C linear, branched, or cyclic monovalent hydrocarbon group that may contains a heteroatom. The near infrared light-absorbing dye compound is especially excellent in solvent solubility in addition to excellent optical properties and heat resistance, thereby being excellent in coating properties and workability suitable for a film forming step, and moreover being suitably used in a process of fabricating semiconductor devices, because it does not contain any heavy metals in the structure.;COPYRIGHT: (C)2012,JPO&INPIT