MEASURING APPARATUS FOR ELEMENT ADSORPTION/DESORPTION AMOUNT

摘要

PROBLEM TO BE SOLVED: To provide a measuring apparatus for element adsorption/desorption amount, having a balance which is capable of performing accurate measuring at all the time without being thermally influenced by a heater which heats a corrosive gas or an object to be measured.;SOLUTION: A measuring apparatus for an element adsorption/desorption amount is configured to measure the amount of elements adsorbed to an object to be measured or the amount of elements desorbed from the object to be measured. The measuring apparatus comprises a balance 25 which measures the weight of the object to be measured, a tray 34 which is arranged to be positioned lower than the balance and in which the object to be measured is placed, a connection member 26 which connects the balance and the tray, a first container 21 which accommodates the balance therein, a second container 22 which accommodates the tray therein and includes a heating source for heating the object to be measured, a thermal shield plate 24 which shields the balance in the first container from heat of the heating source, and an exhaust mechanism which introduces a gas from a lower portion of the second container into the container and exhausts the gas from the upper portion thereof.;COPYRIGHT: (C)2013,JPO&INPIT