CHARACTERISTICS ESTIMATION METHOD AND REPLACEMENT METHOD FOR EDDY CURRENT TYPE DISPLACEMENT SENSORS, AND EDDY CURRENT TYPE DISPLACEMENT SENSOR

摘要

PROBLEM TO BE SOLVED: To make available for choice, when an eddy current type displacement sensor has run into trouble, an appropriate replacing component by accurately estimating characteristics of the sensor thereby to enable the trouble to be promptly addressed.;SOLUTION: A method comprising steps of sweeping the excitation frequency of an eddy current type displacement sensor subject to characteristics estimation to measure the maximum level of a Q value and the excitation frequency at that maximum level (Q value characteristic) (S1, S2 and S3), a step of comparing the Q value characteristic of the eddy current type displacement sensor subject to the characteristics estimation and a pre-measured Q value characteristic of a known eddy current type displacement sensor (S4), and a step of estimating the type and characteristics of the eddy current type displacement sensor subject to the characteristics estimation on the basis of the result of comparison (S5).;COPYRIGHT: (C)2012,JPO&INPIT