LIQUID TREATMENT APPARATUS, LIQUID TREATMENT METHOD AND, STORAGE MEDIUM HAVING COMPUTER PROGRAM FOR EXECUTING IT RECORDED THEREIN

摘要

PROBLEM TO BE SOLVED: To provide a liquid treatment apparatus which can restrict pressure fluctuations inside a liquid treatment unit where a processing body is treated with liquid.;SOLUTION: A liquid treatment apparatus 1 according to the prevent invention comprises a plurality of liquid treatment units 3 in which a process liquid is supplied to a workpiece W to treat the workpiece W with the liquid; a common exhaust conduit 6 which discharges an atmosphere from inside the plurality of liquid treatment units 3; individual exhaust conduits 35 which connect each of the liquid treatment units 3 and the common exhaust conduit 6; opening/closing mechanisms 5 which are installed in an openable/closable manner on the individual exhaust conduits 35; and an open air intake unit 65 which takes in the open air into the common exhaust conduit 6. The common exhaust conduit 6 is provided with an intake amount adjustment valve which adjusts the flow rate of the open air taken in from the open air intake unit 65. A control unit 100 controls the opening of the intake amount adjustment valve on the basis of the open/closed condition of each opening/closing mechanism 5.;COPYRIGHT: (C)2013,JPO&INPIT