LASER ATOM PROBE AND LASER ATOM PROBE ANALYSIS METHOD

摘要

PROBLEM TO BE SOLVED: To provide a laser atom probe system and a method for analyzing a specimen by laser atom probe tomography.;SOLUTION: The laser atom probe system includes: a specimen holder 3 whereon a specimen 2 to be analyzed may be mounted, where the specimen has a tip shape; a detector 4; an electrode 1 arranged between the specimen holder 3 and the detector 4; a voltage source 1 configured to apply a voltage difference between the specimen tip and the electrode; a laser system 5 configured to direct a laser beam laterally at the specimen tip; tip shape monitoring means 10 configured to detect and monitor the shape of the specimen tip; and/or means for altering and/or controlling one or more laser parameters of the laser beam so as to maintain, restore or control the specimen tip shape.;COPYRIGHT: (C)2012,JPO&INPIT