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PATTERN DRAWING METHOD, PATTERN DRAWING DEVICE, DATA PROCESSING DEVICE AND DATA PROCESSING METHOD

机译:图案绘制方法,图案绘制装置,数据处理装置和数据处理方法

摘要

PROBLEM TO BE SOLVED: To enable starting drawing in a short time with stable execution, in regard to pattern drawing on a drawing object while making a drawing pattern coincident with an underlying pattern.;SOLUTION: A run-length data 212 is generated by rasterizing (RIP processing) vector-form design data 211 before drawing processing. In the drawing processing, the run-length data 212 is stripped, or directly corrected on the basis of each division pattern, so as to reconfigure strip data 212a. Based on the strip data 212a, the division pattern is drawn on a substrate. Accordingly, it is possible to start the pattern drawing in a short time as compared to the conventional technique in which the RIP processing is performed during drawing. Also, the pattern drawing can be executed stably, because a time required for drawing each division pattern is substantially identical, irrespective of drawing pattern contents.;COPYRIGHT: (C)2012,JPO&INPIT
机译:解决的问题:为了在短时间内开始稳定执行绘图,关于在使图形与基础图形重合的同时,在图形对象上进行图形绘制;解决方案:通过光栅化生成行程数据212 (RIP处理)绘制处理前的矢量形式设计数据211。在绘制处理中,游程长度数据212被剥离,或者基于每个分割图案被直接校正,以便重新配置条数据212a。基于带数据212a,在基板上绘制分割图案。因此,与在绘制期间执行RIP处理的传统技术相比,可以在短时间内开始图案绘制。另外,由于绘制每个分割图案所需的时间基本上相同,而与绘制图案内容无关,因此可以稳定地执行图案绘制。版权所有:(C)2012,JPO&INPIT

著录项

  • 公开/公告号JP2012074615A

    专利类型

  • 公开/公告日2012-04-12

    原文格式PDF

  • 申请/专利权人 DAINIPPON SCREEN MFG CO LTD;

    申请/专利号JP20100219646

  • 发明设计人 KITAMURA KIYOSHI;NAKAI KAZUHIRO;

    申请日2010-09-29

  • 分类号H01L21/027;G03F7/20;

  • 国家 JP

  • 入库时间 2022-08-21 17:42:58

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