PIEZOELECTRIC VIBRATION PIECE, METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATION PIECE, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC EQUIPMENT, AND RADIO-CONTROLLED TIMEPIECE

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric vibration piece that can improve a short-circuit defect without increasing a resistance value R1.;SOLUTION: There is provided a method for manufacturing the piezoelectric vibration piece using a wafer made of a piezoelectric material. An electrode forming process (S4) of forming a pair of electrodes on an external surface of a piezoelectric plate by patterning an electrode film comprises an electrode film forming process (S4a) of forming the electrode film on the surface of the piezoelectric plate; a photoresist film forming process (S4b) of forming a photoresist film on the electrode film; a first exposure process (S4c) of exposing the photoresist film through a mask having a first opening arranged for a photoresist pattern; and a second exposure process (S4d) of further exposing the photoresist film through a correction mask having a second opening arranged at a position overlapping with the first opening. An opening width of the second opening corresponding to a gap of the pair of electrodes is equal to or less than an opening width of the first opening corresponding to the gap.;COPYRIGHT: (C)2012,JPO&INPIT