METHOD FOR MANUFACTURING PIEZOELECTRIC VIBRATION PIECE, PIEZOELECTRIC VIBRATION PIECE, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO-CONTROLLED TIMEPIECE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a piezoelectric vibration piece superior in vibration characteristic.SOLUTION: A method for manufacturing a piezoelectric vibration piece comprises: a first mask formation step for forming, on a surface of a wafer S, a first mask for an outline pattern of a top face 21; a plasma processing step for plasma processing the surface of the wafer S through the first mask; a second mask formation step for forming, on the resultant surface of the wafer S, a second mask 91a for an outline pattern for the top face 21 and an inclined surface 25; and an inclined surface formation step for wet-etching the wafer S through the second mask 91a, thereby forming the inclined surface 25 in a region to form the inclined surface 25 in, which is covered by the second mask 91a.