DISTURBANCE OBSERVER, FEEDBACK COMPENSATOR, POSITIONING DEVICE, EXPOSURE DEVICE AND METHOD FOR DESIGNING DISTURBANCE OBSERVER

摘要

PROBLEM TO BE SOLVED: To provide a disturbance observer, a feedback compensator, a positioning device, exposure device and a method for designing the disturbance observer which can stabilize a resonance phase using a phase lead compensator and a phase lag compensator which are based on a transfer function decided by a designer without a process of trial and error.;SOLUTION: As for a disturbance observer 21 for estimating disturbance d which is given to an control target 28, its complementary sensitivity function parameters are designed based on a disturbance model including a resonance element of the control target 28 as a part of the disturbance d.;COPYRIGHT: (C)2012,JPO&INPIT