DETECTOR FOR DETECTING ELECTRIC FIELD DISTRIBUTION OR CARRIER DISTRIBUTION BASED ON INTENSITY OF HIGHER ORDER HARMONIC

摘要

PROBLEM TO BE SOLVED: To provide a detector having means to evaluate carrier generation and extinction.;SOLUTION: A detector which detects an electric field distribution or carrier distribution between electrodes provided in an observation object based on a higher order harmonic, comprises: an irradiation part which irradiates the observation object with a fundamental wave; a detection part which detects the higher order harmonic generated in accordance with the voltage distribution or carrier distribution at the time of the voltage application in the observation object; an excitation irradiation part which irradiates the observation object with an excitation light for making it generate a carrier; and a control signal output part which makes the excitation irradiation part irradiate the observation object with the fundamental wave by a second signal based on a first signal of the excitation irradiation part, and detects, by a third signal, the higher order harmonic in the detection part. The control signal output part is constituted so as to be able to change a time interval between the output time of the first signal and the output time of the second and third signals.;COPYRIGHT: (C)2012,JPO&INPIT